Optical: systems and elements – Compound lens system – Microscope
Reexamination Certificate
2000-05-17
2001-11-06
Nguyen, Thong (Department: 2872)
Optical: systems and elements
Compound lens system
Microscope
C359S368000, C359S391000
Reexamination Certificate
active
06313945
ABSTRACT:
This application claims the benefit of Japanese Patent application No. 11-138084 which is hereby incorporated by reference.
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a stage apparatus and, in particular, to a stage apparatus movable in XY directions.
2. Related Background Art
Conventionally, a stage apparatus is used, for example, in a microscope. The stage includes a base plate fixed on the microscope, an intermediate plate movable in the Y direction (in the back and forth directions relative to the microscope) relative to the base plate, and an upper plate on which a specimen is to be placed movable in the X direction perpendicular to the Y axis (in the right and left directions relative to the microscope). The upper plate is provided so that it is movable not only in the X direction but also in the Y direction integrally with the intermediate plate.
The intermediate plate is provided with a single-axis handle, and the stage can be independently moved in the X and Y directions.
A stage apparatus in which an operation handle for moving a stage in the X and Y directions is disposed on a base plate is also known(gee Japanese Unexamined Patent Publication Hei 9-127427).
In this stage, an intermediate plate (a plate moving in the Y direction) is moved by a rack and pinion, and an upper plate (a plate moving in the X direction) is moved in the Y direction integrally with the intermediate plate. A drive mechanism disposed between the operation handle and the upper plate for moving the upper plate includes two levers and a joining point and can follow the movement in the Y direction of the upper plate.
However, in the former case, when an observer moves the upper plate on which a specimen is placed in the Y direction, the observer has to move his or her hand with the single-axis handle because the single-axis handle also moves in the Y direction.
Meanwhile, an observer usually moves the stage while observing (observing through an eyepiece lens).
Accordingly, once the observer moves his or her hand off the handle, the observer has to grope for the handle, and when the handle is not stationary as described above, it is difficult to find the handle, and the operability of the stage is poor. In particular, when a wafer, a reticle, a liquid crystal substrate, etc. are to be observed, the stage should be large-sized, and thus the handle moves a longer distance and is more difficult to find.
Thus, the operability of the conventional stage apparatus used in a microscope is extremely poor, and, for an observer who uses the microscope for many hours, the operation of the stage has been very fatiguing work.
In the latter case, because the handle is stationary, the stage is easy to handle; however, the stage is structurally complicated, is hard to be manufactured with a high degree of precision (for example, to decrease backlash) and requires a large space to be incorporated.
SUMMARY OF THE INVENTION
The present invention has been made in view of such circumstances, and its object is to provide a stage apparatus easy to handle and simple in structure.
The stage apparatus of the present invention to solve the above problems is characterized in that it comprises a base element to be fixed to a main body of a microscope; a first moving element movable in a first direction relative to the base element; a second moving element movable in a second direction perpendicular to the first direction relative to the first moving element; a first rotary operation means disposed on said base element for moving said first moving element; a second rotary operation means disposed on said base element for moving said second moving element; a first drive means disposed between said first operation means and said first moving element for transmitting the rotational force of said first operation means to said first moving element; a rotary shaft that is disposed on said base element, extends along said first direction, and rotates in response to the rotary operation of said second rotary operation means; a transmitting means that is disposed coaxially with said rotary shaft, is movable in the direction of the axis of said rotary shaft, and is rotatable integrally with said rotary shaft; and a second drive means disposed between said transmitting means and said second moving element for transmitting the rotational force of said second operation means to said second moving element.
When the first rotary operation means is rotated, the rotational force is transmitted to the first moving element via the first drive means, and the first moving element moves in the first direction. When the second rotary operation means is rotated, the rotational force is transmitted to the second moving element via the rotary shaft, the transmitting means, and the second drive means, and the second moving element moves in the second direction perpendicular to the first direction. The transmitting means moves in the first direction integrally with the first moving element and the second moving element. On this occasion, because the first rotary operation means and the second rotary operation means are disposed on the base plate, they do not move even when the first moving element and the second moving element are moved. Further, the stage is structurally simple as compared with conventional examples.
In the stage apparatus, said second rotary operation means and said first rotary operation means may be disposed on said rotary shaft extending along said first direction and on an operation shaft perpendicular to said rotary shaft, respectively. Because the second rotary operation means is disposed on the rotary shaft, the number of components can be reduced.
REFERENCES:
patent: 4711537 (1987-12-01), Schindl et al.
patent: 4766465 (1988-08-01), Takahashi
patent: 6049420 (2000-04-01), Kraft
Morgan & Lewis & Bockius, LLP
Nguyen Thong
Nikon Corporation
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