Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate
2005-06-08
2008-12-02
Berman, Jack I. (Department: 2881)
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
C250S491100, C250S492100
Reexamination Certificate
active
07459701
ABSTRACT:
A stage apparatus for displacing an object having a substantially flat surface is described. The apparatus includes an object table for supporting the object and a positioning device for displacing the object table in a first direction. The apparatus further includes a clamping device for clamping the object to the object table by a first clamping force, the first clamping force being controlled by an electronic control unit based upon a state of the object.
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Baggen Marcel Koenraad Marie
Bijvoet Dirk-Jan
Donders Sjoerd Nicolaas Lambertus
Hoogkamp Jan Frederik
Jansen Albert Johannes Maria
ASML Netherlands B.V.
Berman Jack I.
Pillsbury Winthrop Shaw & Pittman LLP
Smyth Andrew
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