Stage apparatus, lithographic apparatus and device...

Details Stage apparatus, lithographic apparatus and device... Stage apparatus, lithographic apparatus and device...

2005-07-13

2008-08-26

Lee, Diane I. (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for original

C430S005000

Reexamination Certificate

active

07417715

ABSTRACT:
In order to improve the productivity of a lithographic apparatus, a stage apparatus for holding two patterning devices is described. The patterning devices are arranged such that the distance between the patterns in the scanning direction corresponds to the length of the pattern in the scanning direction. By doing so, an improved exposure sequence may be performed by exposing a first die with a first pattern, skipping a second die adjacent to the first die, and exposing a third die adjacent to the second die using a second pattern.

REFERENCES:
patent: 5923403 (1999-07-01), Jain
patent: 6383940 (2002-05-01), Yoshimura
patent: 6628372 (2003-09-01), McCullough et al.
patent: 6800408 (2004-10-01), McCullough et al.
patent: 2003/0142284 (2003-07-01), Lin
patent: 2003/0147060 (2003-08-01), Tokuda et al.
patent: 2004/0263846 (2004-12-01), Kwan
patent: 2005/0012913 (2005-01-01), Verweij et al.
patent: 2005/0140957 (2005-06-01), Luijkx et al.

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