Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2011-04-12
2011-04-12
Kim, Peter B (Department: 2882)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S071000
Reexamination Certificate
active
07924406
ABSTRACT:
An illuminator for a lithographic apparatus includes a first illuminator channel, a second illuminator channel, a first switch device, an additional illuminator part and a second switch device. Each of the first and the second illuminator channel includes elements which are adjustable to provide a radiation beam with at least one desired property. The first switch device is configured to receive the radiation beam and arranged to direct the radiation beam between the first and second illuminator channels. The second switch device is arranged to receive the radiation beam from the first and second illuminator channels and direct the radiation beam through the additional illuminator part. The additional illuminator part includes elements which apply at least one additional desired property to the radiation beam.
REFERENCES:
patent: 5923403 (1999-07-01), Jain
patent: 6383940 (2002-05-01), Yoshimura
patent: 6603533 (2003-08-01), Go
patent: 6628372 (2003-09-01), McCullough et al.
patent: 6800408 (2004-10-01), McCullough et al.
patent: 2003/0142284 (2003-07-01), Lin
patent: 2003/0147060 (2003-08-01), Tokuda et al.
patent: 2004/0263846 (2004-12-01), Kwan
patent: 2005/0012913 (2005-01-01), Verweij et al.
patent: 2005/0140957 (2005-06-01), Luijkx et al.
patent: 2000-21748 (2000-01-01), None
patent: WO2005/027207 (2005-03-01), None
Bleeker Arno Jan
Jorritsma Laurentius Catrinus
Loopstra Erik Roelof
Mulder Heine Melle
Noordman Oscar Franciscus Jozephus
ASML Netherlands B.V.
Kim Peter B
Liu Chia-how Michael
Pillsbury Winthrop Shaw & Pittman LLP
LandOfFree
Stage apparatus, lithographic apparatus and device... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Stage apparatus, lithographic apparatus and device..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Stage apparatus, lithographic apparatus and device... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2635828