Stage apparatus in exposing apparatus

Details Stage apparatus in exposing apparatus Stage apparatus in exposing apparatus

1989-12-01

1991-05-14

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

250557, G01N 2186

Patent

active

050158660

ABSTRACT:
In an exposing apparatus for copy transferring a pattern formed on a mask onto a substrate, the substrate is supported on a leveling stage mounted on a two-dimensionally movable stage. Two-dimensional deviation amounts of the substrate in relation to the moving stage, caused by inclination of the leveling stage, are detected and are compensated by controlling the movement of the moving stage, thereby correcting the relative positional relation between the mask and the substrate.

REFERENCES:
patent: 4558949 (1985-12-01), Uehara et al.
patent: 4650983 (1987-03-01), Suwa
patent: 4770531 (1988-09-01), Tanaka et al.
patent: 4780617 (1988-10-01), Umatate et al.
patent: 4870452 (1989-09-01), Tanimoto et al.
patent: 4874954 (1989-10-01), Takahashi et al.
patent: 4880310 (1989-11-01), Nishi
patent: 4902900 (1990-02-01), Kamiya et al.

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