Stage apparatus having rotary table

Details Stage apparatus having rotary table Stage apparatus having rotary table

1998-05-12

2000-07-04

Fulton, Christopher W.

Geometrical instruments

Miscellaneous

Light direction

33569, 33573, 33DIG2, 269 73, B23Q 318, G01B 700

Patent

active

060820101

ABSTRACT:
A stage apparatus having a rotary table and a method of operating the same are provided. The stage apparatus includes a base, a stage which is rectilinearly movable on the upper surface of the base, and a rotary table which is rotatable on the stage and on which a workpiece is to be placed. Therefore, a larger workpiece can be effectively manufactured using the stage apparatus.

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patent: 5518550 (1996-05-01), Korenaga et al.
patent: 5760500 (1998-06-01), Kondo et al.

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