Stage apparatus, exposure apparatus, and semiconductor...

Details Stage apparatus, exposure apparatus, and semiconductor... Stage apparatus, exposure apparatus, and semiconductor...

2005-11-15

2005-11-15

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S075000

Reexamination Certificate

active

06965428

ABSTRACT:
A stage apparatus has a substrate holding unit which chucks and holds a substrate, and includes a flat surface having a recess where the substrate holding unit is to be mounted. A fixing member fixes a projection support provided to the substrate holding unit onto the flat surface. The substrate holding unit is supported by the fixing member while a distal end of the projection support is in contact with the recess of the flat surface and the remaining portion of the substrate holding unit is not in contact with the flat surface.

REFERENCES:
patent: 4737824 (1988-04-01), Sakai et al.
patent: 5160961 (1992-11-01), Marumo et al.
patent: 5191218 (1993-03-01), Mori et al.
patent: 5231291 (1993-07-01), Amemiya et al.
patent: 5608773 (1997-03-01), Korenaga et al.
patent: 5883932 (1999-03-01), Chiba et al.
patent: 5923408 (1999-07-01), Takabayashi
patent: 5999589 (1999-12-01), Chiba et al.

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