Stage apparatus, exposure apparatus, and device...

Details Stage apparatus, exposure apparatus, and device... Stage apparatus, exposure apparatus, and device...

2008-01-22

2008-01-22

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S053000, C355S077000, C310S012060

Reexamination Certificate

active

07321418

ABSTRACT:
A stage apparatus includes a base, a stage movable on the base in first and second directions, a first member movable relative to the base in the first direction, and a second member movable relative to the base in the second direction. The first member is placed on the second member. With this arrangement, drive reaction-forces generated due to movement of the stage can be canceled by moving the first and second members, resulting in a smaller space needed for accommodating a canceling mechanism.

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patent: 2004-254489 (2004-09-01), None

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