Stage apparatus and exposure apparatus

Photocopying – Projection printing and copying cameras – With temperature or foreign particle control

Reexamination Certificate

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Details

C355S053000, C355S072000, C355S077000, C310S016000

Reexamination Certificate

active

11094311

ABSTRACT:
A moving element to be propelled across a stator includes a coil unit, including coils, for generating a force to propel the moving unit, and a cooling unit for cooling the coil unit. A thermal conductive member, arranged between the cooling unit and the coil unit, transmits heat away from the coil unit. In addition, a housing unit houses the coil unit, the cooling unit and the thermal conductive member.

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patent: 6266133 (2001-07-01), Miyajima et al.
patent: 6320649 (2001-11-01), Miyajima et al.
patent: 6414742 (2002-07-01), Korenaga et al.
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patent: 6791670 (2004-09-01), Miyajima et al.
patent: 2001/0001248 (2001-05-01), Emoto
patent: 2003/0141045 (2003-07-01), Oh et al.
patent: 2004/0130688 (2004-07-01), Emoto
patent: 2004/0151924 (2004-08-01), Sambasivan et al.
patent: 2004/0218166 (2004-11-01), Vreugdewater et al.
patent: 2004/0218167 (2004-11-01), Hol et al.
patent: 2005/0007575 (2005-01-01), Miyajima
patent: 2005/0254036 (2005-11-01), Sasaki et al.
patent: 2005/0275821 (2005-12-01), Miyajima
patent: 11-190786 (1999-07-01), None

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