Radiant energy – Supported for nonsignalling objects of irradiation
Reexamination Certificate
2011-08-09
2011-08-09
Souw, Bernard E (Department: 2881)
Radiant energy
Supported for nonsignalling objects of irradiation
C250S492100, C355S075000, C355S053000
Reexamination Certificate
active
07994484
ABSTRACT:
The present invention provides a stage apparatus wherein an object is disposed in an atmosphere with a gas pressure lower than atmospheric pressure, and the object can be driven with high accuracy. The stage apparatus that drives a reticle comprises: a vacuum chamber, which forms a space and has an opening; an integrated coarse and fine motion table, which has an electrostatic chuck that holds the object, that, when driven, moves the electrostatic chuck inside the space; a counter mass, which is disposed so that it covers the opening, that is capable of moving because of the reaction force produced when the integrated coarse and fine motion table is driven; and a vacuum cover, which forms a space that houses the counter mass; wherein the space and the space are set to prescribed gas pressures.
REFERENCES:
patent: 6445440 (2002-09-01), Bisschops et al.
patent: 6950176 (2005-09-01), LaFontaine et al.
patent: 7391498 (2008-06-01), Hayashi
patent: 7489389 (2009-02-01), Shibazaki
patent: 2002/0159042 (2002-10-01), Poon
patent: 2003/0201606 (2003-10-01), Shinozaki
patent: 2004/0094722 (2004-05-01), Bisschops et al.
patent: 2005/0093502 (2005-05-01), Poon et al.
patent: 1 052 550 (2000-11-01), None
patent: 1 052 551 (2000-11-01), None
patent: 1 310 828 (2003-05-01), None
patent: 1 350 997 (2003-10-01), None
patent: A-2000-331930 (2000-11-01), None
patent: A-2003-31491 (2003-01-01), None
patent: A-2003-229472 (2003-08-01), None
patent: A-2004-95797 (2004-03-01), None
patent: A-2004-260161 (2004-09-01), None
Dec. 25, 2007 International Search Report for PCT/JP2007/068647 (with translation).
Dec. 25, 2007 Written Opinion of the International Searching Authority for PCT/JP2007/068647 (with translation).
Mar. 2, 2011 Supplementary European Search Report issued in European Patent Application No. 07828420.5.
Nikon Corporation
Oliff & Berridg,e PLC
Souw Bernard E
LandOfFree
Stage apparatus and exposure apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Stage apparatus and exposure apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Stage apparatus and exposure apparatus will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2694549