Stage apparatus and coating treatment device

Details Stage apparatus and coating treatment device Stage apparatus and coating treatment device

2011-01-25

2011-01-25

Hassanzadeh, Parviz (Department: 1716)

Coating apparatus

Work holders, or handling devices

C414S222010

Reexamination Certificate

active

07874261

ABSTRACT:
A stage apparatus includes a stage over which a substrate is to be transferred, and a levitation mechanism which levitates the substrate over the stage. The stage includes a plurality of gas spray ports (16a) to spray a gas for levitating the substrate (G), and a plurality of suction ports (16b) to take in air sprayed from the gas spray ports (16a). The plurality of gas spray ports (16a) and the plurality of suction ports (16b) are set not to be arranged on straight lines parallel to a substrate transfer direction in a predetermined length along the substrate transfer direction.

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Machine Translation of JP2004331265.
Machine Translation of JP2002151571.

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