Stage apparatus

Details Stage apparatus Stage apparatus

2011-06-14

2011-06-14

Wilson, Lee D (Department: 3727)

Work holders

Holder mounted for movement

Including means to shift holder position

C269S060000, C269S061000

Reexamination Certificate

active

07959141

ABSTRACT:
The present invention reduces the footprint of a stage apparatus to achieve a more compact apparatus. Using a Y-axis shaft having a magnet on the inside and a Y-axis mover constituted by a coil that surrounds the Y-axis shaft as a Y-axis drive part for moving a Y-axis movable body makes the drive part smaller than a linear motor. Consequently, a lateral part that faces a side gliding surface is arranged downwardly of the one Y-axis mover, to thereby eliminate the footprint occupied by the lateral part when lined up side-by-side with the Y-axis drive part.

REFERENCES:
patent: 4492356 (1985-01-01), Taniguchi et al.
patent: 4766465 (1988-08-01), Takahashi
patent: 5623853 (1997-04-01), Novak et al.
patent: 5760564 (1998-06-01), Novak
patent: 5839324 (1998-11-01), Hara
patent: 5996437 (1999-12-01), Novak et al.
patent: 6323935 (2001-11-01), Ebihara et al.
patent: 3-245932 (1991-11-01), None

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