Stage apparatus

Details Stage apparatus Stage apparatus

2011-08-16

2011-08-16

Wilson, Lee D (Department: 3723)

Work holders

Holder mounted for movement

Relative to a station

C269S059000

Reexamination Certificate

active

07997567

ABSTRACT:
A stage apparatus, includes a holding member configured to hold a subject; an elevation supporting member configured to support the holding member so that the holding member can go up and down; a rotation supporting member configured to support the elevation supporting member so that the elevation supporting member can be rotated with respect to a Z axis; and a Z axis driving part configured to elevate the holding member in a Z axial direction; wherein the Z axis driving part is located on the rotation supporting member and makes the holding member go up and down relative to the rotation supporting member.

REFERENCES:
patent: 5609332 (1997-03-01), Hassell
patent: 5717482 (1998-02-01), Akutsu et al.
patent: 07-230950 (1995-08-01), None
patent: 7226354 (1995-08-01), None
patent: 2003-028973 (2003-01-01), None
patent: 2003-028974 (2003-01-01), None
patent: 0180925 (1999-04-01), None

Affiliated with

Also associated with

Rating

Stage apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Stage apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Stage apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2652091