Electricity: motive power systems – Plural – diverse or diversely controlled electric motors – Motors with diverse motions
Patent
1995-04-03
1998-03-10
Martin, David S.
Electricity: motive power systems
Plural, diverse or diversely controlled electric motors
Motors with diverse motions
318 51, 318135, 318649, 318687, 318685, H02K 3300
Patent
active
057265429
ABSTRACT:
Position apparatus for controlling the movement of a table, on which a semiconductor work is carried along a unidirectional path in rectangular coordinate system. The table is driven in a single plane by x and y coordinate drive control means. The position apparatus includes guide means for supporting the table on the base; first drive means for driving the table in a first direction, a second drive means for driving the table in a second direction opposite to the first direction and controller means for controlling the first and second drive means to cause the table to stop without causing table vibration and without overshoot.
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Martin David S.
Meller Michael N.
Nikon Corporation
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