Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2005-12-13
2005-12-13
Mathews, Alan (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S072000, C318S687000
Reexamination Certificate
active
06975383
ABSTRACT:
A stage alignment apparatus includes a first moving member which can move in a first direction, a second moving member which can move in a second direction different from the first direction, a stage which is slidably supported by the first moving member and the second moving member and is guided in the first and second directions, a first control section which controls a posture, in a third direction different from the first and second directions, of the first moving member, and a second control section which controls a posture, in the third direction, of the second moving member on the basis of a signal which controls the posture of the first moving member. The second control section controls the posture of the second moving member on the basis of a signal which controls the posture of the first moving member filtered by a predetermined filter.
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