Stacked process modules for a semiconductor handling system

Details Stacked process modules for a semiconductor handling system Stacked process modules for a semiconductor handling system

2004-11-10

2008-09-09

Fox, Charles A (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

C414S805000, C414S937000

Reexamination Certificate

active

07422406

ABSTRACT:
Methods and systems are provided for a vacuum-based semiconductor handling system. The system may be a linear system with a four-link robotic SCARA arm for moving materials in the system. The system may include one or more vertically stacked load locks or vertically stacked process modules.

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