Stacked capacitor with a thin film ceramic oxide layer

Details Stacked capacitor with a thin film ceramic oxide layer Stacked capacitor with a thin film ceramic oxide layer

1993-09-02

1994-10-04

Thomas, Tom

Fishing, trapping, and vermin destroying

437 47, 437 60, 437192, 437919, H01L 2170

Patent

active

053526228

ABSTRACT:
A self-aligned thin-film ceramic oxide stacked capacitor on an underlying semiconductor substrate using a spin-on ceramic oxide fabricated by forming conductive pillars and the lower electrode, forming a temporary layer, building up the semiconductor substrate around the temporary layer, removing the temporary layer, and then spinning on the ceramic oxide. This results in a ceramic oxide stacked capacitor with the conformal thin-film ceramic oxide encapsulated by the top electrode.

REFERENCES:
patent: 5003428 (1991-03-01), Shepherd
patent: 5045899 (1991-09-01), Arimoto
patent: 5061650 (1991-10-01), Denninson et al.
patent: 5229309 (1993-07-01), Kato
patent: 5262343 (1993-11-01), Rhodes et al.
patent: 5266512 (1993-11-01), Kirsch

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