Stacked capacitor having a corrugated electrode

Details Stacked capacitor having a corrugated electrode Stacked capacitor having a corrugated electrode

1996-09-30

1998-11-10

Kincaid, Kristine L.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

361303, 3613061, 257306, 257296, H01G 430

Patent

active

058353372

ABSTRACT:
In a semiconductor device, such as a memory cell, including a capacitor, a corrugated electrode is used as a lower electrode of the capacitor and is covered with an insulation film to be opposed to an upper electrode. The corrugated electrode is specified in section by a series of folded portions which are alternately folded vertically and horizontally. Practically, the corrugated electrode is formed by a corrugated wall which surrounds a hollow space and which has a rectangular or a polygonal shape on a plane. Alternatively, the corrugated wall has an irregular surface formed by an aggregation of grains so as to effectively widen a surface of the lower electrode. Such a corrugated electrode may be manufactured by a mold which is formed by selectively etching a stack of first-kind spacer films and second-kind spacer films.

REFERENCES:
patent: 5142639 (1992-08-01), Kohyama et al.
patent: 5170233 (1992-12-01), Liu et al.
patent: 5240871 (1993-08-01), Doan et al.
patent: 5330928 (1994-07-01), Tseng
patent: 5362664 (1994-11-01), Jun
patent: 5436188 (1995-07-01), Chen
(corrs to JPA 5-175450).
Patent Abstracts of Japan, vol. 17, No. 504 (E-1430) Sep. 10, 1993 (corrs to JPA 5-129548).

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