Stacked and cross-connected recirculating fans in a semiconducto

Details Stacked and cross-connected recirculating fans in a semiconducto Stacked and cross-connected recirculating fans in a semiconducto

1990-06-04

1991-12-03

Wayner, William E.

Ventilation

Having both inlet and outlet airways

With air pump means

4174235, 454236, 454187, F24F 1300, F04B 1700

Patent

active

050691139

ABSTRACT:
A pair of recirculating fans for semiconductor cleanroom use are stacked to allow each fan to service a smaller zone in the cleanroom than if the fans were placed side by side. Each fan controls the temperature, humidity, and particulate count for its own zone of the cleanroom, thereby allowing strict control of these parameters. The ductwork of the two fans are cross connected so that either fan can be maintained or repaired while the other fan services its own zone and the zone normally serviced by the off-line fan.

REFERENCES:
patent: 2053395 (1936-09-01), Dodge
patent: 2996973 (1961-08-01), Boysen

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