Semiconductor device manufacturing: process – Making passive device – Stacked capacitor
Reexamination Certificate
2011-05-17
2011-05-17
Brewster, William M. (Department: 2823)
Semiconductor device manufacturing: process
Making passive device
Stacked capacitor
C438S618000
Reexamination Certificate
active
07943476
ABSTRACT:
A stack capacitor in a semiconductor device includes a first capacitor formed on and/or over a semiconductor substrate and a second capacitor formed on and/or over the first capacitor. The first and second capacitors each have a multi-layer laminated structure which includes a lower electrode, a capacitor dielectric layer and an upper electrode. At least two of the lower electrodes and the upper electrodes are arranged vertically with respect to each other to have the same width and/or surface area.
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Brewster William M.
Dongbu Hi-Tek Co., Ltd.
Sher & Vaughn, PLLC
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