Electrical resistors – Resistance value responsive to a condition – Ambient temperature
Reexamination Certificate
2007-05-29
2007-05-29
Lee, Kyung (Department: 2832)
Electrical resistors
Resistance value responsive to a condition
Ambient temperature
C338S252000, C219S270000, C219S528000, C219S543000
Reexamination Certificate
active
11288490
ABSTRACT:
A sensor system has an AlN substrate, a W layer on the substrate, a signal source adapted to apply an electrical actuating signal to the W layer, and a sensor adapted to sense the response of the W layer. The W layer can comprise a thin film, with various types of optional protective layers over the film. Applications include sensing temperature, fluid flow rates, fluid levels, pressure and chemical environments. For a planar heater, the W layer comprises a plurality of conductive strands distributed on the substrate, with the strands generally parallel and serpentine shaped for a rectangular substrate, and extending along respective lines of longitude that merge at opposite poles of the substrate for a circular substrate.
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Heetronix
Koppel, Patrick, Heybl & Dawson
Lee Kyung
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