Stable energy detector for extreme ultraviolet radiation...

Details Stable energy detector for extreme ultraviolet radiation... Stable energy detector for extreme ultraviolet radiation...

2006-02-14

2006-02-14

Ho, Allen C. (Department: 2882)

Radiant energy

Invisible radiant energy responsive electric signalling

Ultraviolet light responsive means

C250S505100

Reexamination Certificate

active

06998620

ABSTRACT:
A detector for use with an EUV photon source emitting around 11-15 nm includes at least one multilayer mirror for reflecting the beam along an optical path include a detector element, a filter for reducing the bandwidth of the beam, and the detector element. The detector element preferably comprises a Si pn diodes with doped dead region and zero surface recombination or PtSi-nSi barrier for increasing the long term stability of the detector.

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