Stabilized polysilicon resistor and a method of manufacturing it

Electrical resistors – With base extending along resistance element – Resistance element coated on base

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338308, H01C 1012

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active

061409103

ABSTRACT:
A resistor has a resistor body of polycrystalline silicon and electric terminals arranged on and/or in the resistor body. A resistor portion is thus formed between the terminals, which gives the resistor its resistance. The material in the resistor body is doped with for example boron. In order to block unsaturated silicon bonds in grain boundaries to a sufficient extent and thereby give the resistor a good long-time stability, fluorine atoms are added to the material. They are added in such a high concentration that all of the otherwise unsaturated bonds are coupled to fluorine atoms. Further, it is provided in the manufacture of the resistor that the concentration is maintained at the originally high value. When ion implanting dopants and fluorine atoms it can be accomplished by performing an annealing after implanting dopants at a high temperature and then a further annealing operation at a low temperature after the subsequent implantation of fluorine.

REFERENCES:
patent: 4740478 (1988-04-01), Zdebel et al.
patent: 5196723 (1993-03-01), Andersson et al.
patent: 5212108 (1993-05-01), Liu et al.
Japanese Abstract 5-55470, Mar. 5, 1993.
T. Kamins, Polycrystalline Silicon for Integrated Circuit Applications, Kluwer Academic Publishers, pp. i-viii, 155-202, 212-215, 281-290, (1988) No Month.
S. Maegawa et al., "Performance and Reliability Improvements in Poly-Si TFT's by Fluorine Implantation into Gate Poly-Si" IEEE Transactions on Electron Devices, vol. 42, No. 6, pp. 1106-1112 (Jun. 1995).
A. Yoshida et al., "Hydrogen, fluorine ion implantation effects on polycrystalline silicon grain boundaries" Solar Energy Materials and Solar Cells, vol. 34, pp. 211-217 (1994) No Month.

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