Supports – Stand – To hold a particular article
Patent
1996-01-05
1999-01-26
Ramirez, Ramon O.
Supports
Stand
To hold a particular article
248676, 248678, F16M 1100
Patent
active
058630171
ABSTRACT:
A laser system support structure is provided having an independent, kinematically mounted chamber and optics platform. Swivel-type mounts are used to couple the platform at three points to the laser support frame, thereby allowing the platform to remain static while the support frame, via the swivel mounts, deflects around the platform in response to external forces. The independent platform design provides secondary benefits of creating a compartmentalization of laser system components, leading to a modular type design. Each laser system module is mounted to the support structure on an extension rail, to allow removal of the module from the support frame for easy access during servicing.
REFERENCES:
patent: 4534047 (1985-08-01), Deschenaux et al.
patent: 4719641 (1988-01-01), Muller et al.
patent: 4760583 (1988-07-01), Sasnett et al.
patent: 5040953 (1991-08-01), Tinsler
de Boer et al., "Ein SchwingungsisolierterMeBtisch mit Niveau-Regelung," Feinwerktechnik & Messtechnik, vol. 88, No. 5 (Aug. 1980) pp. 233-236 .
deRuyter Anthony John
Gerent Jerry Rudy
Larson Donald Glenn
Mixon Curtiss Lynn
Cymer Inc.
Power David J.
Ramirez Ramon O.
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