Organic compounds -- part of the class 532-570 series – Organic compounds – Heavy metal containing
Patent
1994-06-17
1995-05-02
Dees, Jose G.
Organic compounds -- part of the class 532-570 series
Organic compounds
Heavy metal containing
556146, 556 45, 556117, 556130, 4272481, C07F 100, C07F 1504, C07F 1506, C07F 306
Patent
active
054121299
ABSTRACT:
A precursor used in an MOCVD reactor for production of thin films of certain metal oxides is stabilized by introducing a ligand into the precursor during the precursor synthesis and thereby protecting the precursor from premature oxidation, nucleation, and decomposition.
REFERENCES:
patent: 3911176 (1975-10-01), Curtis et al.
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Alex A. Wernberg et al. "MOCVDDeposition of Epitaxial LiNbO.sub.3 Thin FIlms Using the Single-Source Precursor LiNb(OEt).sub.6 ", 1993, vol. 5 (8), pp. 1056-1058, Chem. Mater.
B. J. Curtis et al. "The Growth of Thim FIlms of Lithium niobate by Chemical Vapour Deposition", 1975, vol. 10, pp. 515-520, Mat. Res. Bull.
Dees Jos,e G.
Nazario-Gonzalez Porfirio
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