Powder metallurgy processes – Forming articles by uniting randomly associated metal particles
Patent
1995-10-30
1998-09-15
Jordan, Charles T.
Powder metallurgy processes
Forming articles by uniting randomly associated metal particles
75232, 75249, 75340, 419 66, 420529, 420537, 420538, 420548, 420550, 420551, 420552, C22C 104, C22C 2100, B22F 302, B22F 500
Patent
active
058093931
ABSTRACT:
A sputtering target comprising a body of metal such as aluminum and its alloy with an ultrafine grain size and small second phase. Also described is a method for making an ultra-fine grain sputtering target comprising melting, atomizing, and depositing atomized metal to form a workpiece, and fabricating the workpiece to form a sputtering target. A method is also disclosed that includes the steps of extruding a workpiece through a die having contiguous, transverse inlet and outlet channels of substantially identical cross section, and fabricating the extruded article into a sputtering target. The extrusion may be performed several times, producing grain size of still smaller size and controlled grain texture.
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Dunlop John Alden
Emigh Roger Alan
Kardokus Janine Kiyabu
Yuan Jun
Jenkins Daniel
Johnson Matthey Electronics Inc.
Jordan Charles T.
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