Sputtering target used for forming quinary superconductive oxide

Details Sputtering target used for forming quinary superconductive oxide Sputtering target used for forming quinary superconductive oxide

1989-06-08

1991-12-31

Lieberman, Paul

Superconductor technology: apparatus, material, process

High temperature , per se

Having tc greater than or equal to 150 k

75234, 20419224, 20429813, 419 19, 505731, H01L 3912

Patent

active

050772694

ABSTRACT:
A target used for forming a thin film of a quinary superconductive oxide contains metal copper ranging between about 8% and about 40% by volume dispersed into a quaternary or a quinary complex oxide, and the metal copper improves the thermal conductivity and the electrical conductivity of the target, so that cracks are less liable to take place in the target and the target is applicable to a d.c. sputtering system, thereby decreasing the production cost of the thin film.

REFERENCES:
patent: 4866032 (1989-09-01), Fujimori et al.
patent: 4968665 (1990-11-01), Ohuchi et al.
Ramesh, "New Modulated Structure in a Pb-Doped . . . ", Appl. Phys. Lett., vol. 53 (22), Nov. 28, 1988, pp. 2220-2222.
Yamada, "Pb Introduction to the High-Tc Superconductor Bi-SrCa-Cu-O", Jap. Jnl. Appl. Phys., vol. 27(6), Jun. 1988, pp. L996-L998.
Johs, "Preparation of High Tc Tl-Ba-Ca-Cu-O Thin Films . . . ", Appl. Phys. Lett. 54(18), May 1, 1989, pp. 1810-1811.
Ohkuma, "Preparation of Y-Ba-Cu-O Thin Films by Rf. Mag. Sputtering", Jap. Jnl. Appl. Phys., vol. 26(9), Sept. 1987, pp. L1484-L1485.
Michikami, "Synthesis of Y-Ba-Cu-O Thin Films on Sapphire Substrates . . . ", Jap. Jnl. Appl. Phys., vol. 26(6), Jun. 1987, pp. L1199-L1201.
Akoh, "Thickness Dependence of Superconductivity in Rf-Sputtered Y-Ba-Cu-O . . . ", Appl. Phys. Lett. 52(20), May 16, 1988, pp. 1732-1734.
Asano, "High Tc Y-Ba-Cu-O Thin Films Prepared by . . . Sputtering", Jap. Jnl. Appl. Phys. vol. 26(7), July 1987, pp. L1221-L1222.
Qiu, "Formation of Tl-Ba-Ca-Cu-O Films by Diffusion of Tl . . . ", Appl. Phys. Lett., 53(12), Sept. 19, 1988, pp. 1122-1124.
Komuro, "Structures and Superconducting Properties of Y-Ba-Cu-O Sputtered Films", Jap. Jnl. Appl. Phys., vol. 26(11), Nov. 1987, pp. L1967-L1909.
Aida, "Preparation of YBa.sub.2 Cu.sub.3 O.sub.7-x Superconducting Thin Films by . . . Sputtering", Jap. Jnl. Appl. Phys., vol. 26(9), Sept. 1987, pp. L1489-L1491.
Gurvitch, "Preparation and Substrate Reactions of Superconducting Y-Ba-Cu-O Films", Appl. Phys. Lett., 51(13), Sept. 28, 1987, pp. 1027-1029.
Gross, "Spatially resolved Observation of the Critical Current . . . ", Nature, vol. 332, Apr. 28, 1988, pp. 818-819.
Nakao, "Magnetron Sputtering of Bi-Ca-Sr-Cu-O Thin Films . . . ", Jap. Jnl. Appl. Phys., vol. 27(3), mar. 1988, pp. L378-L380.
Koinuma, "Preparation of High-Tc Bi-Sr-Ca-Cu-O Superconducting . . . ", Jap. Jnl. Appl. Phys., vol. 27(3), Mar. 1988, pp. L376-L377.
Park, "Effect of Uniaxial Strain on . . . Thin Y-Ba.sub.2 Cu.sub.O.sub.x Film", Mat. Res. Soc. Symp. Proc. vol. 99, Nov.-Dec. 1987, pp. 685-688.
Kang, "Preparation of Superconducting YBa.sub.2 Cu.sub.3 O.sub.7-x Films . . . ", Ext. Abst.: High Temp. Super. (MRS), Apr. 5-9, 1988, pp. 209-210.

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