Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent
1995-12-12
1998-07-28
Weisstuch, Aaron
Chemistry: electrical and wave energy
Apparatus
Coating, forming or etching by sputtering
20419226, 428 645, C23C 1434
Patent
active
057858284
ABSTRACT:
A sputtering target for fabricating a recording layer of a phase-change type optical recording medium contains a compound or mixture including as constituent elements Ag, In, Te and Sb with the respective atomic percent (atom.%) of .alpha., .beta., .gamma.and .delta.thereof being in the relationship of 2.ltoreq..alpha..ltoreq.30, 3.ltoreq..beta..ltoreq.30, 10.ltoreq..gamma..ltoreq.50, 15.ltoreq..delta..ltoreq.83 and .alpha.+.beta.+.gamma.+.delta.=100, and a method of producing the above sputtering target is provided. A phase-change type optical recording medium includes a recording layer containing as constituent elements Ag, In, Te and Sb with the respective atomic percent of .alpha., .beta., .gamma.and .delta.thereof being in the relationship of 0<.alpha..ltoreq.30, 0<.beta..ltoreq.30, 10.ltoreq..gamma..ltoreq.50, 10.ltoreq..delta..ltoreq.80, and .alpha.+.beta.+.gamma.+.delta.=100, and is capable of recording and erasing information by utilizing the phase changes of a recording material in the recording layer. A method of fabricating the above phase-change type optical recording medium is also provided.
REFERENCES:
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Patent Abstracts of Japan. vol. 018 No. 496 (M-1674, 16 Sep. 1994 & JP-A-06-166268 (Ricoh Co. Ltd) 14 Jun. 1994 *abstract*.
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Deguchi Hiroshi
Harigaya Makoto
Hayashi Yoshitaka
Ide Yukio
Iwasaki Hiroko
Ricoh & Company, Ltd.
Weisstuch Aaron
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