Sputtering target containing zinc sulfide as major...

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Reexamination Certificate

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C428S064400, C430S270130, C106S420000, C204S298130

Reexamination Certificate

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10503296

ABSTRACT:
Provided is a sputtering target and an optical recording medium having formed thereon a phase change optical disc protective film having zinc sulfide as its principal component employing such a target, as well as the manufacturing method thereof, characterized in that the sputtering target has zinc sulfide as its principal component, and is capable of adjusting the refractive index of a film containing conductive oxide in the range of 2.0 to 2.6. This sputtering target, and an optical recording medium having formed thereon a phase change optical disc protective film having zinc sulfide as its principal component employing such a target, is capable of reducing particles (dust emission) and nodules that arise during sputtering, has minimal variation in quality and is capable of improving mass productiveness, and in which the crystal grain is fine and has a high density of 90% or more.

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Patent Abstracts of Japan, 1 page English Abstract of JP 2001-316804, Nov. 2001.

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