Electric heating – Metal heating – For bonding with pressure
Reexamination Certificate
2006-01-31
2006-01-31
Shaw, Clifford C. (Department: 1725)
Electric heating
Metal heating
For bonding with pressure
C204S298120, C219S091230, C219S093000
Reexamination Certificate
active
06992261
ABSTRACT:
A method of forming a sputtering target assembly and other metal articles is described. Sputtering target assemblies and metal articles are also described. The method includes bonding a sputter target to a backing plate using resistance heating or welding to bond assembly members that respectively include mating projections and grooves formed in bonding surfaces thereof.
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Kachalov Mikhail Y.
Wickersham, Jr. Charles E.
Cabot Corporation
Shaw Clifford C.
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