Metal treatment – Process of modifying or maintaining internal physical... – Heating or cooling of solid metal
Reexamination Certificate
2009-11-13
2011-10-04
Roe, Jessee R. (Department: 1733)
Metal treatment
Process of modifying or maintaining internal physical...
Heating or cooling of solid metal
C072S352000
Reexamination Certificate
active
08029629
ABSTRACT:
A sputtering target manufactured by die forging is provided. It is characterized in that an average crystal grain size D at a portion where an average crystal grain size is the largest and an average crystal grain size d at a portion where an average crystal grain size is the smallest are related as 1.0<D/d<2.0. Further provided is a method capable of constantly manufacturing a sputtering target excellent in characteristics by improving and elaborating forging and heat treatment processes to render a crystal size fine and uniform, and a sputtering target excellent in quality obtained by this method.
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Howson & Howson LLP
JX Nippon Mining & Metals Corporation
Roe Jessee R.
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