Sputtering apparatus having an on board service module

Details Sputtering apparatus having an on board service module Sputtering apparatus having an on board service module

1996-01-04

1997-04-15

Breneman, R. Bruce

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20429811, 118719, 118720, 118721, C23C 1456, C23C 1600

Patent

active

056205783

ABSTRACT:
A system for sputtering a substrate is disclosed. The system includes a central housing having at least one process module for forming the layer, wherein the process module is in fluid communication with the central housing and includes a first device used in conjunction with forming the layer on the substrate. In addition, the system includes at least one service module in fluid communication with the central housing, wherein the service module includes at least one replacement device suitable for replacing the first device. The central housing includes a robotic element for transporting the first device from the process module to the service module and for transporting the replacement device from the service module to the process module in order to replace the first device. In addition, the service module includes a dedicated pump for evacuating the service module to a high vacuum in order to reduce surface outgassing of the replacement device to a desired level before use.

REFERENCES:
patent: 3314395 (1967-04-01), Hemmer
patent: 3516386 (1970-06-01), Landwehr et al.
patent: 4909695 (1990-03-01), Hurwitt et al.
patent: 5065698 (1991-11-01), Koike
patent: 5076205 (1991-12-01), Vowles et al.
patent: 5244554 (1993-09-01), Yamagata et al.
patent: 5364219 (1994-11-01), Takahashi et al.
patent: 5429729 (1995-07-01), Kamei et al.

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