Sputtering apparatus and method of preventing damage thereof

Details Sputtering apparatus and method of preventing damage thereof Sputtering apparatus and method of preventing damage thereof

2010-09-27

2011-11-08

Neckel, Alexa (Department: 1723)

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

C118S728000

Reexamination Certificate

active

08052853

ABSTRACT:
A sputtering apparatus includes a container; a plate for supporting the container; a first attachment for attaching the container to the plate; and a second attachment for less tightly attaching the container to the plate than through the first attachment.

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Office Action issued in Korean Application No. 10-2005-0055521.

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