Sputtering

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating

Patent

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Details

204192C, 204298, C23C 1500

Patent

active

044798628

ABSTRACT:
A layer of urethane or silicone elastomer is interposed between a plastic film undergoing sputter deposition and a support for the film to avoid thermal damage to the film.

REFERENCES:
patent: 4341816 (1982-07-01), Lauterbach et al.
Van Esdonk et al., Research/Development Jan. 1975, pp. 41-44.

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