Sputtered titanium oxynitride films

Details Sputtered titanium oxynitride films Sputtered titanium oxynitride films

1987-03-26

1989-08-29

Swisher, Nancy A. B.

Stock material or miscellaneous articles

Composite

Of quartz or glass

428630, 428432, 428672, B32B 1504

Patent

active

048616699

ABSTRACT:
A sputtered titanium oxynitride film is disclosed, as well as a low emissivity coated article comprising a titanium oxynitride film in combination with a highly infrared reflective metal film, such as silver.

REFERENCES:
patent: 3990784 (1976-11-01), Gelber
patent: 4022947 (1977-05-01), Grubb et al.
patent: 4450201 (1984-05-01), Brill et al.
patent: 4534841 (1985-08-01), Hartig et al.
patent: 4535000 (1985-08-01), Gordon
patent: 4546050 (1985-10-01), Amberger

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