Sputtered ruthenium oxide coatings in electrolytic capacitor

Details Sputtered ruthenium oxide coatings in electrolytic capacitor Sputtered ruthenium oxide coatings in electrolytic capacitor

2006-01-16

2008-08-12

Ha, Nguyen T (Department: 2831)

Metal working

Barrier layer or semiconductor device making

C361S516000, C361S523000, C361S525000, C361S528000, C361S529000

Reexamination Certificate

active

07410509

ABSTRACT:
A capacitor is described. the capacitor includes a casing; a cathode of an active material of at least an oxide of a first metal provided on a substrate, wherein the active material is characterized as being of a substantially homogeneous coating formed by sputtering a target of the first metal in a vacuum chamber; an anode spaced from the cathode coating; and an electrolyte in contact with the cathode coating and the anode. The casing contains the anode, the cathode and the electrolyte. A method and apparatus for providing the sputtered coating is also disclosed.

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