Powder metallurgy processes – Powder metallurgy processes with heating or sintering – Powder pretreatment
Reexamination Certificate
2007-12-25
2007-12-25
King, Roy (Department: 1742)
Powder metallurgy processes
Powder metallurgy processes with heating or sintering
Powder pretreatment
C419S028000, C419S048000, C419S049000
Reexamination Certificate
active
10739401
ABSTRACT:
A method of fabricating a sputter target comprises: homogenously blending a plurality of powders including at least a first powder and a second powder. The first powder is comprised of chromium (Cr), cobalt (Co), ruthenium (Ru), nickel (Ni), or iron (Fe). The second powder is comprised of boron (B), carbon (C), a nitrogen (N)-containing material, a boride, a carbide, a nitride, a silicide, an oxygen (O)-containing material or an oxide. The second powder has a particle size of between 0.01 microns and 50 microns. The method further comprises: canning the blended plurality of powders to form a substantially non-segregated encapsulated powdered material mix; pressing the encapsulated powdered material mix to form a billet; and machining the billet to form a sputter target.
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Heraeus Inc.
King Roy
Mai Ngoclan T.
McDermott Will & Emery LLP
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