Sputter initiated resonance ionization spectrometry

Radiant energy – Ionic separation or analysis

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250288, 250423P, B01D 5944

Patent

active

044423543

ABSTRACT:
Apparatus and method are described for the quantitative analysis of a specific specie within a sample. The analysis has sufficient sensitivity for the detection of as little as one atom of the desired species. The method is accomplished by bombarding a sample with a highly focused charged particle beam; for example, a beam of positive argon ions having an energy from five to thirty kilovolts and a current of one milliampere or greater. This beam impinging upon the sample creates a cloud including secondary ions and neutral particles of the constituents of the sample. The cloud is irradiated with a laser beam having selected wavelengths therein for the unique ionization of the desired specie by means of resonance ionization spectroscopy (RIS). In most applications some energy and/or mass discrimination is required. The energy discrimination can be accomplished by passing the RIS ions through an energy filter, with the ions emanating therefrom having a narrow range of energy. Then, if desired, a mass discrimination may be accomplished in an appropriate mass analyzer such as a time of flight spectrometer, an r.f. quadrupole mass spectrometer or a magnetic sector mass spectrometer.

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patent: 4070580 (1978-01-01), Gallagher et al.
patent: 4302676 (1981-11-01), Levin et al.
patent: 4365157 (1982-12-01), Unsold et al.

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