Sputter coating of microspherical substrates by levitation

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating

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204298, 428406, C23C 1500

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active

043023118

ABSTRACT:
Microspheres are substantially uniformly coated with metals or nonmetals by simultaneously levitating them and sputter coating them at total chamber pressures less than 1 torr. A collimated hole structure 12 comprising a parallel array of upwardly projecting individual gas outlets 16 is machined out to form a dimple 11. Glass microballoons, which are particularly useful in laser fusion applications, can be substantially uniformly coated using the coating method and apparatus.

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