Sputter-coating of glass sheets or other substrates

Details Sputter-coating of glass sheets or other substrates Sputter-coating of glass sheets or other substrates

1974-08-28

1976-03-23

Tung, T.

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

204298, C23C 1500

Patent

active

039459039

ABSTRACT:
Means for supporting a glass sheet substrate during the sputter-coating of a thin film of metal or metal-alloy thereon, comprising a rigid metal platen having a major supporting surface, and an overlay for the metal platen consisting of at least one glass plate covering the major supporting surface of the platen and directly supporting thereon the glass sheet substrate during the sputter-coating operations.

REFERENCES:
patent: 2424353 (1947-07-01), Essig
patent: 2475469 (1949-07-01), Bennett et al.
patent: 2492682 (1949-12-01), Carpenter et al.
patent: 3617463 (1971-11-01), Gregor et al.
patent: 3620957 (1971-11-01), Emery et al.
"Handbook of Thin Film Technology" by Maissel & Glang, McGraw-Hill, N.Y., 1970, pp. 7-50.

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