Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Electrical signal parameter measurement system
Patent
1997-07-11
2000-04-18
Wachsman, Hal Dodge
Data processing: measuring, calibrating, or testing
Measurement system in a specific environment
Electrical signal parameter measurement system
702 65, 702117, 324715, 324757, 324758, 324765, 382145, G01R 2700
Patent
active
06052653&
ABSTRACT:
A system for automatic spreading resistance profiling of wafer specimens. The system comprises a positioning stage for positioning the specimens for contact by probe tips and alternately a probe conditioning fixture or a sample calibration fixture. The system further comprises a programmed computer for controlling the positioning stage to effect automatic specimen profiling, probe tip conditioning, and calibration.
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Andy Mark J.
Hartford Catherine L.
Mazur Robert G.
Rogers John R.
Stephenson Robert C.
Solid State Measurements, Inc.
Wachsman Hal Dodge
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