SPM cantilever and manufacturing method thereof

Details SPM cantilever and manufacturing method thereof SPM cantilever and manufacturing method thereof

2005-04-20

2010-06-15

Williams, Hezron (Department: 2856)

Measuring and testing

Surface and cutting edge testing

Roughness

C850S058000, C977S849000, C977S860000

Reexamination Certificate

active

07735357

ABSTRACT:
An SPM cantilever of the present invention including: a support portion (1) fabricated by processing a single crystal silicon wafer; a lever portion (2) formed in a manner extended from the support portion; a probe (3) disposed at a free end side of the lever portion; a coating of graphite film (5) covering all over the side on which the probe is formed and the entire probe; and a piece of thin line (6) consisting of a carbon nanofiber (CNF) or carbon nanotube (CNT) or graphite nanofiber (GNF) grown/formed from the graphite film at a probe terminal end portion (3a).

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