SPM cantilever and fabricating method thereof

Details SPM cantilever and fabricating method thereof SPM cantilever and fabricating method thereof

2006-03-14

2006-03-14

Raevis, Robert (Department: 2856)

Measuring and testing

Surface and cutting edge testing

Roughness

Reexamination Certificate

active

07010966

ABSTRACT:
Disclosed herein is SPM cantilever having a support portion, a lever portion extended from the support portion and a probe portion formed at a free end of the lever portion, said probe portion having a generally plate-like form and the probe portion having an additionally sharpened terminal end portion. The terminal end portion has its length greater than the plate thickness thereof and is reduced in thickness toward a tip of the terminal end portion, and the tip is located inwardly of the planes extended from the front and back sides of a base portion of the plate-like probe portion.

REFERENCES:
patent: 5811017 (1998-09-01), Matsuyama
patent: 6246054 (2001-06-01), Toda et al.
patent: 6415653 (2002-07-01), Matsuyama
patent: 2624873 (1997-04-01), None
patent: 2984094 (1999-09-01), None

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