SPM cantilever

Details SPM cantilever SPM cantilever

2005-07-19

2005-07-19

Raevis, Robert (Department: 2856)

Measuring and testing

Surface and cutting edge testing

Roughness

Reexamination Certificate

active

06918286

ABSTRACT:
A silicon nitride film is formed all over the surface of a cantilever prepared as including a support portion made by processing single-crystal silicon wafer, a lever portion extended from the support portion, formed with a controlled thickness from single-crystal silicon, and a probe portion made of single-crystal silicon disposed toward the free end of the lever portion with having its probe axis perpendicular to the lever portion, so as to have a greater film thickness on the side face of the probe portion toward the free end of the lever portion, thereby constructing SPM cantilever of configuration where the terminal end portion of the probe portion is tilted toward the free end by a certain angle θ with respect to the probe axis. The SPM cantilever thereby can be achieved as capable of measuring surface conditions always at high resolution correspondingly to measuring condition or sample shape.

REFERENCES:
patent: 5239863 (1993-08-01), Kado et al.
patent: 5345816 (1994-09-01), Clabes et al.
patent: 6011261 (2000-01-01), Ikeda et al.
patent: 6121771 (2000-09-01), Moser
patent: 6457350 (2002-10-01), Mitchell
patent: 6528785 (2003-03-01), Nakayama et al.
patent: 2000-275260 (2000-10-01), None

Affiliated with

Also associated with

Rating

SPM cantilever does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with SPM cantilever, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and SPM cantilever will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3412049