Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1998-07-10
1999-12-07
Kim, Robert H.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356349, G01B 902
Patent
active
059992611
ABSTRACT:
Processing two interference signals to reconstruct a target image includes splitting a laser beam into a reference beam and a measurement beam, and in turn splitting the reference beam into two sub-reference beams. A phase shift is introduced into one of the sub-reference beams, the phase shift being substantially 90 degrees. A measurement beam is reflected from a surface of a moving target, and split into two sub-measurement beams. A first respective sub-reference beam is combined with a first sub-measurement beam, and the second sub-reference beam is combined with the second sub-measurement beam, and the in phase and out of phase signals reconstruct the target surface. Adjustment of the split sub-reference beams is effected by Pockels cells to achieve the desired phase difference between the two sub-reference beams. The reconstructed motion of the target surface is effected with a selected frequency characteristic, spatial resolution and range characteristic.
REFERENCES:
patent: 4019818 (1977-04-01), Vilkomerson
patent: 4514054 (1985-04-01), Stowe
patent: 5818588 (1998-10-01), Matsumoto et al.
Cheng Yuh-Jen
Pressesky Jason L.
Kim Robert H.
Seagate Technology Inc.
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