Fishing – trapping – and vermin destroying
Patent
1991-10-28
1992-07-14
Thomas, Tom
Fishing, trapping, and vermin destroying
437 60, 437192, 437200, 437919, H01L 2170
Patent
active
051302675
ABSTRACT:
A metal-to-polysilicon capacitor, a floating-gate transistor containing such a capacitor, and a method for making the same is disclosed. The bottom plate of the capacitor is formed over a field oxide structure, and the capacitor dielectric is deposited thereover. A first metal layer, such as titanium nitride or a titanium-tungsten alloy, is formed over the capacitor dielectric, and is patterned and etched to define the top plate of the capacitor and, accordingly, the capacitor size. Multilevel dielectric is formed thereover, and a contact via to the top plate is etched therethrough. Metallization is sputtered overall, to make contact to the top plate and elsewhere in the circuit.
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Kaya Cetin
Tigelaar Howard L.
Braden Stanton C.
Donaldson Richard L.
Hiller William E.
Texas Instruments Incorporated
Thomas Tom
LandOfFree
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