Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1982-07-26
1985-05-07
Karlsen, Ernest F.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324 65R, G01R 3100, G01R 2702
Patent
active
045160716
ABSTRACT:
An electrical testing structure and method whereby a test structure is fabricated on, e.g., a large scale integrated circuit wafer along with the circuit components and has a van der Pauw cross resistor in conjunction with a bridge resistor and a split bridge resistor, the latter having two channels each a line width wide, corresponding to the line width of the wafer circuit components, and with the two channels separated by a space equal to the line spacing of the wafer circuit components. The testing structure has associated voltage and current contact pads arranged in a two by four array for conveniently passing currents through the test structure and measuring voltages at appropriate points to calculate the sheet resistance, line width, line spacing, and line pitch of the circuit components on the wafer electrically.
REFERENCES:
patent: 4347479 (1982-08-01), Cullet
Hall, Resistance Calculations for Thin Film Patterns, Thin Solid Film, vol. 1, at 277-295, (1967-1968).
Van der Pauw, a Method of Measuring Specific Resistivity and Hall Effect of Discs of Arbitrary shape, Philips Res. Repts., vol. 13, No. 1, at 1-9, (Feb. 1958).
Von der Pauw, A Method of Measuring the Resistivity and Hall Coeficient on Lamellae of Arbitrary Shape, Philips Technical Review, vol. 20 at 220-224.
Buehler, Comprehensive Test Patterns with Modular Test Structures, the 2 by N Probe-Pad Array Approach, Solid State Technology, Oct. 1979, at 89-94.
Buehler, Grant, Thurber, Bridge and Van der Pauw, Sheet Resistors for Characterizing the Line Width of Conducting Layers, J. Electroclem Soc., vol. 125, No. 4, at 650-654, (1978).
David and Buehler, A Numerical Analysis of Various Cross Sheet Resistor Test Structures, Solid State Electronics., vol. 20, pp. 539-543, (1977).
Jones Thomas H.
Karlsen Ernest F.
Manning John R.
McCaul Paul F.
The United States of America as represented by the Administratio
LandOfFree
Split-cross-bridge resistor for testing for proper fabrication o does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Split-cross-bridge resistor for testing for proper fabrication o, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Split-cross-bridge resistor for testing for proper fabrication o will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1802360