Splash retarder

Details Splash retarder Splash retarder

1983-06-27

1985-05-21

Favors, Edward G.

Drying and gas or vapor contact with solids

Apparatus

With apparatus using centrifugal force

34 8, 34 52, F26B 1724

Patent

active

045177520

ABSTRACT:
An apparatus and method for retarding splashback of liquids collected from a rotating workpiece is disclosed. In accordance with the apparatus, there is provided a work station upon which a workpiece, such as a semiconductor wafer, is positioned, a collecting means for collecting liquids discharged from the workpiece by rotation of the work station and a means for rotating the collecting means. Also in accordance with the present invention, the collecting means may be rotated separately from the work station but in the same direction as the work station. In accordance with the method, there is provided applying liquids to the workpiece, rotating work station with the workpiece positioned on it and rotating a collecting means in the same direction as the work station. Also in accordance with the invention, the apparatus may be combined with apparatus for a segregated drainage of first and second liquids such that splashback during collection of these liquids will be retarded.

REFERENCES:
patent: 1903174 (1933-03-01), Ferguson
patent: 3742611 (1973-07-01), Koller
patent: 3861584 (1975-01-01), Dudrey
patent: 3920181 (1975-11-01), Lega et al.
patent: 4087924 (1978-05-01), Fujimoro et al.
patent: 4281031 (1981-07-01), Hillman et al.
patent: 4350282 (1982-09-01), Dudrey et al.
patent: 4445281 (1984-05-01), Aigoo

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