Spiral resistor integrated on a semiconductor substrate

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Passive components in ics

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257488, 257489, 257577, H01L 2900

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active

054988993

ABSTRACT:
A spiral resistor being of a type formed on a semiconductor substrate to withstand high voltages, comprises at least one thin field-plate layer covering said substrate between adjacent turns of the resistor. This prevents the well-known phenomenon of the "phantom gate" from occurring which would result in the characteristics of spiral resistors deteriorating over time.

REFERENCES:
patent: 4423433 (1983-12-01), Imaizumi et al.
patent: 4792840 (1988-12-01), Nadd
patent: 5053743 (1991-10-01), Mille et al.
Patent Abstracts of Japan, vol. 6, No. 12 (E-91) (890) Jan. 23, 1982, and JP-A-56 133 863 (Citizen Tokei K.K.) Oct. 20, 1981.

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