Spiral planar inductor and manufacturing method thereof

Details Spiral planar inductor and manufacturing method thereof Spiral planar inductor and manufacturing method thereof

2011-07-12

2011-07-12

Fahmy, Wael M (Department: 2814)

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Passive components in ics

C257S536000, C257S622000, C257S381000, C257S758000, C257SE21022, C257SE21520, C257SE23007, C438S238000, C438S381000, C438S026000, C438S003000, C438S108000, C438S106000, C438S622000

Reexamination Certificate

active

07977767

ABSTRACT:
An inductor includes an inductor wiring made of a metal layer and having a spiral planar shape. In a cross-sectional shape in a width direction of the inductor wiring, the inductor wiring has a larger film thickness at least in its inner side end than in its middle part.

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